SYSTEM AND PROCESS FOR HEATING SEMICONDUCTOR WAFERS BY OPTIMIZING ABSORPTION OF ELECTROMAGNETIC ENERGY

Details for Australian Patent Application No. 2002354012 (hide)

International Classifications

Event Publications

20 March 2003 Complete Application Filed

Priority application(s): 10/040,272 07.11.01 US

24 July 2003 Application Open to Public Inspection

Published as AU-A-2002354012

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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