TIMING CONTROL FOR TWOCHAMBER GAS DISCHARGE LASER SYSTEM

Details for Australian Patent Application No. 2002353869 (hide)

Owner CYMER INC.

Inventors ERSHOV, Alexander, I.; NESS, Richard, M.

Pub. Number AU-A-2002353869

PCT Number PCT/US02/34045

PCT Pub. Number WO2003/049241

Priority 10/012,002 30.11.01 US; 10/036,727 21.12.01 US

Filing date 23 October 2002

Wipo publication date 17 June 2003

International Classifications

H01S 003/22 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 10/012,002 30.11.01 US; 10/036,727 21.12.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002353869

19 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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