AN APPARATUS AND METHOD FOR CLEANING GLASS SUBSTRATES USING A COOL HYDROGEN FLAME

Details for Australian Patent Application No. 2002353754 (hide)

Owner ENVIRONMENTAL TECHNOLOGY INSTITUTE INNOVATION CENTRE (NTU)

Inventors CHEN, Sau, Ngen; LIANG, David, Tee

Pub. Number AU-A-2002353754

PCT Number PCT/SG02/00271

PCT Pub. Number WO2003/043751

Priority 200107220-6 21.11.01 SG

Filing date 20 November 2002

Wipo publication date 10 June 2003

International Classifications

B08B 007/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass

C03C 023/00 Other surface treatment of glass not in the form of fibres or filaments

C03B 032/00 Thermal after-treatment of glass products not provided for in groups , e.g. crystallisation, eliminating gas inclusions or other impurities

G02F 001/1333 Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 200107220-6 21.11.01 SG

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002353754

5 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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