CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING APPARATUS

Details for Australian Patent Application No. 2002353628 (hide)

Owner SEMICONTECH CORPORATION JUNG, Taek-Soo

Inventors JUNG, Taek-Soo

Pub. Number AU-A-2002353628

PCT Number PCT/KR02/02176

PCT Pub. Number WO2004/075275

Filing date 21 November 2002

Wipo publication date 9 September 2004

International Classifications

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

14 October 2004 Application Open to Public Inspection

  Published as AU-A-2002353628

4 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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