METHOD AND DEVICE FOR POLISHING PLASMA CHAMBER CATHODE HOLES

Details for Australian Patent Application No. 2002353591 (hide)

Owner WORLDEX INT

Inventors CHUNG, Jae-Keuk

Pub. Number AU-A-2002353591

PCT Number PCT/KR02/02093

PCT Pub. Number WO2004/044971

Filing date 9 November 2002

Wipo publication date 3 June 2004

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01J 009/14 Apparatus or processes specially adapted for the manufacture of electric discharge tubes, discharge lamps, or parts thereof - of non-emitting electrodes

B08B 003/02 Cleaning by methods involving the use or presence of liquid or steam - Cleaning by the force of jets or sprays

Event Publications

20 March 2003 Complete Application Filed

8 July 2004 Application Open to Public Inspection

  Published as AU-A-2002353591

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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