METHOD FOR FORMING THIN FILM

Details for Australian Patent Application No. 2002353585 (hide)

Owner GENITECH CO., LTD.

Inventors KOH, Won-Yong; LEE, Choon-Soo

Pub. Number AU-A-2002353585

PCT Number PCT/KR02/02079

PCT Pub. Number WO2003/041142

Priority 2001-69597 08.11.01 KR

Filing date 8 November 2002

Wipo publication date 19 May 2003

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001-69597 08.11.01 KR

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002353585

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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