METHOD AND APPARATUS FOR CHEMICAL VAPOR DDEPOSITION CAPABLE OF PREVENTING CONTAMINATION AND ENHANCING FILM GROWTH RATE

Details for Australian Patent Application No. 2002353540 (hide)

Owner BYUN, Chul, Soo

Inventors BYUN, Chul, Soo

Pub. Number AU-A-2002353540

PCT Number PCT/KR02/01845

PCT Pub. Number WO2003/034477

Priority 2001/64337 18.10.01 KR; 2002/6957 07.02.02 KR

Filing date 4 October 2002

Wipo publication date 28 April 2003

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001/64337 18.10.01 KR; 2002/6957 07.02.02 KR

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002353540

8 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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