A CHEMISTRY FOR ETCHING QUATERNARY INTERFACE LAYERS ON INGAASP MOSTLY FORMED BETWEEN GAAS AND INXGA(1-X)P LAYERS

Details for Australian Patent Application No. 2002353149 (hide)

Owner MOTOROLA, INC.

Inventors SADAKA, Mariam, G.; ABROKWAH, Jonathan, K.

Pub. Number AU-A-2002353149

PCT Number PCT/US02/39954

PCT Pub. Number WO2003/056616

Priority 10/029,093 21.12.01 US

Filing date 13 December 2002

Wipo publication date 15 July 2003

International Classifications

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C09K 013/04 Etching, surface-brightening or pickling compositions

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 10/029,093 21.12.01 US

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002353149

9 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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