PHASE-SHIFTING INTERFEROMETRY METHOD AND SYSTEM

Details for Australian Patent Application No. 2002353038 (hide)

Owner ZYGO CORPORATION

Inventors DECK, Leslie, L.

Pub. Number AU-A-2002353038

PCT Number PCT/US02/38660

PCT Pub. Number WO2003/050470

Priority 60/339,214 10.12.01 US; 10/304,209 26.11.02 US

Filing date 4 December 2002

Wipo publication date 23 June 2003

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 60/339,214 10.12.01 US; 10/304,209 26.11.02 US

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002353038

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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