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Details for Australian Patent Application No. 2002352993 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors YU, Roy; PRASAD, Chandrika; NARAYAN, Chandrasekhar; POGGE, Bernhard, H.

Pub. Number AU-A-2002352993

PCT Number PCT/US02/38355

PCT Pub. Number WO2003/054956

Priority 10/026,103 19.12.01 US

Filing date 26 November 2002

Wipo publication date 9 July 2003

International Classifications

H01L 021/8234 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 10/026,103 19.12.01 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002352993

2 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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