COMPOSITIONS CONTAINING 1,3-DICARBONYL CHELATING AGENTS FOR STRIPPING RESIDUES FROM SEMICONDUCTORS

Details for Australian Patent Application No. 2002352986 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors WOJTCZAK, William, A.; SEIJO, Fatima, Ma; BERNHARD, David

Pub. Number AU-A-2002352986

PCT Number PCT/US02/38314

PCT Pub. Number WO2003/050221

Priority 10/007,490 05.12.01 US

Filing date 2 December 2002

Wipo publication date 23 June 2003

International Classifications

C11D 009/04 Soap Detergents - containing compounding ingredients other than soaps

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 10/007,490 05.12.01 US

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002352986

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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