UV OPTICAL FLUORIDE CRYSTAL ELEMENTS FOR LamdaLESS THAN200NM LASER LITHOGRAPHY AND METHODS THEREFORE

Details for Australian Patent Application No. 2002352798 (hide)

Owner CORNING INCORPORATED

Inventors PELL, Michael A; TIMOFEEV, Nikolay T; MAYOLET, Alexandre Michel

Pub. Number AU-A-2002352798

PCT Number PCT/US02/37147

PCT Pub. Number WO2003/052392

Priority 0116097 13.12.01 FR; 2002121258 12.08.02 RU

Filing date 19 November 2002

Wipo publication date 30 June 2003

International Classifications

G01N 021/59 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Transmissivity

C30B 029/00 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

G02B 013/14 Optical objectives specially designed for the purposes specified below - for use with infra-red or ultra-violet radiation

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 0116097 13.12.01 FR; 2002121258 12.08.02 RU

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002352798

2 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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