ELECTROTHERMAL SELF-LATCHING MEMS SWITCH AND METHOD

Details for Australian Patent Application No. 2002352597 (hide)

Owner CONVENTOR, INCORPORATED

Inventors CUNNINGHAM, Shawn,J.

Pub. Number AU-A-2002352597

PCT Number PCT/US02/36009

PCT Pub. Number WO2003/041133

Priority 60/337,527 09.11.01 US; 60/337,528 09.11.01 US; 60/337,529 09.11.01 US; 60/338,055 09.11.01 US; 60/338,069 09.11.01 US; 60/338,072 09.11.01 US

Filing date 8 November 2002

Wipo publication date 19 May 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 60/337,527 09.11.01 US; 60/337,528 09.11.01 US; 60/337,529 09.11.01 US; 60/338,055 09.11.01 US; 60/338,069 09.11.01 US; 60/338,072 09.11.01 US

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002352597

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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