ZINC OXIDE LAYER AND METHOD FOR THE PRODUCTION THEREOF

Details for Australian Patent Application No. 2002351959 (hide)

Owner FORSCHUNGSZENTRUM JULICH GMBH FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Inventors JIA, Chunlin; SZYSZKA, Bernd; JIANG, Xin

Pub. Number AU-A-2002351959

PCT Number PCT/EP02/12589

PCT Pub. Number WO2003/040426

Priority 101 55 712.4 09.11.01 DE

Filing date 11 November 2002

Wipo publication date 19 May 2003

International Classifications

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

C30B 029/18 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

C23C 014/08 Coating by vacuum evaporation, by sputtering or by ion implantation - Oxides

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 101 55 712.4 09.11.01 DE

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002351959

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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