AIR PLATEN FOR LEADING EDGE AND TRAILING EDGE CONTROL

Details for Australian Patent Application No. 2002351372 (hide)

Owner LAM RESEARCH CORPORATION

Inventors XU, Cangshan; WEI, David; LUONG, Tony; DE LA LLERA, Anthony; PHAM, Xuyen

Pub. Number AU-A-2002351372

PCT Number PCT/US02/39805

PCT Pub. Number WO2003/053633

Priority 10/037,452 20.12.01 US

Filing date 12 December 2002

Wipo publication date 9 July 2003

International Classifications

B24B 007/22 Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 10/037,452 20.12.01 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002351372

9 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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