METHOD FOR REMOVAL OF IMPURITIES IN CYCLIC SILOXANES USEFUL AS PRECURSORS FOR LOW DIELECTRIC CONSTANT THIN FILMS

Details for Australian Patent Application No. 2002351223 (hide)

Event Publications

20 March 2003 Complete Application Filed

Priority application(s): 10/015,326 13.12.01 US

28 August 2003 Application Open to Public Inspection

Published as AU-A-2002351223

2 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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