MULTIPLE ELECTRON BEAM DEVICE

Details for Australian Patent Application No. 2002350488 (hide)

Owner ICT, INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBH

Inventors WINKLER, Dieter; ADAMEC, Pavel; GOHL, Achim; BANZHOF, Helmut

Pub. Number AU-A-2002350488

PCT Number PCT/EP02/11135

PCT Pub. Number WO2003/032361

Priority 01123855.7 05.10.01 EP

Filing date 4 October 2002

Wipo publication date 22 April 2003

International Classifications

H01J 037/304 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 01123855.7 05.10.01 EP

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002350488

24 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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