CATADIOPTRIC REDUCTION LENS HAVING A POLARIZATION BEAMSPLITTER

Details for Australian Patent Application No. 2002350478 (hide)

Owner CARL ZEISS SMT AG

Inventors ZACZEK, Christoph; MULDERS, Thomas

Pub. Number AU-A-2002350478

PCT Number PCT/EP02/11022

PCT Pub. Number WO2004/019105

Priority 102 38 612.9 19.08.02 DE

Filing date 2 October 2002

Wipo publication date 11 March 2004

International Classifications

G02B 017/08 Systems with reflecting surfaces, with or without refracting elements - Catadioptric systems

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 102 38 612.9 19.08.02 DE

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2002350478

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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