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Details for Australian Patent Application No. 2002350233 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors FECHNER, Paul, S.

Pub. Number AU-A-2002350233

PCT Number PCT/US02/37479

PCT Pub. Number WO2003/049153

Priority 10/006,470 03.12.01 US

Filing date 21 November 2002

Wipo publication date 17 June 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 10/006,470 03.12.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002350233

19 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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