FEEDFORWARD TEMPERATURE CONTROL OF DEVICE UNDER TEST

Details for Australian Patent Application No. 2002349971 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors TOUZELBAEV, Maxat

Pub. Number AU-A-2002349971

PCT Number PCT/US02/33528

PCT Pub. Number WO2003/040740

Priority 10/039,525 07.11.01 US

Filing date 18 October 2002

Wipo publication date 19 May 2003

International Classifications

G01R 031/316 Arrangements for testing electric properties

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 10/039,525 07.11.01 US

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002349971

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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