MEASUREMENT DEVICE FOR ELECTRON MICROSCOPE

Details for Australian Patent Application No. 2002349843 (hide)

Owner NANOFACTORY INSTRUMENTS AB

Inventors SVENSSON, Krister; ALTHOFF, Fredrik; DANILOV, Andrey; OLIN, Hakan

Pub. Number AU-A-2002349843

PCT Number PCT/SE02/02065

PCT Pub. Number WO2003/043051

Priority 0103781-1 12.11.01 SE

Filing date 12 November 2002

Wipo publication date 26 May 2003

International Classifications

H01J 037/26 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Electron or ion microscopes

G01B 007/34 Measuring arrangements characterised by the use of electric or magnetic means - for measuring roughness or irregularity of surfaces

G01B 021/30 Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass - for measuring roughness or irregularity of surfaces

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 0103781-1 12.11.01 SE

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002349843

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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