WAFER SEPARATION APPARATUS

Details for Australian Patent Application No. 2002349422 (hide)

Owner MIMASU SEMICONDUCTOR INDUSTORY CO., LTD.

Inventors TSUCHIYA, Masato

Pub. Number AU-A-2002349422

PCT Number PCT/JP02/12753

PCT Pub. Number WO2004/051735

Filing date 5 December 2002

Wipo publication date 23 June 2004

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B65G 049/07 Conveying systems characterised by their application for specified purposes not otherwise provided for - for semiconductor wafers

B65H 003/08 Separating articles from piles - using pneumatic force

B65H 003/48 Separating articles from piles - Air blast acting on edges of, or under, articles

B65G 059/04 De-stacking of articles

B65G 049/06 Conveying systems characterised by their application for specified purposes not otherwise provided for

Event Publications

13 March 2003 Complete Application Filed

29 July 2004 Application Open to Public Inspection

  Published as AU-A-2002349422

25 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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