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Details for Australian Patent Application No. 2002349115 (hide)

Owner INTEL CORPORATION

Inventors ICHIKAWA, Kinya; KUMAMOTO, Takashi

Pub. Number AU-A-2002349115

PCT Number PCT/US02/17882

PCT Pub. Number WO2002/101812

Priority 09/878,123 08.06.01 US

Filing date 6 June 2002

Wipo publication date 23 December 2002

International Classifications

H01L 021/48 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/56 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/498 Details of semiconductor or other solid state devices

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 09/878,123 08.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002349115

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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