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Details for Australian Patent Application No. 2002348979 (hide)

Owner ELEMENT SIX LIMITED

Inventors WHITEHEAD, Andrew, John; TWITCHEN, Daniel, James; SCARSBROOK, Geoffrey, Alan

Pub. Number AU-A-2002348979

PCT Number PCT/IB02/04723

PCT Pub. Number WO2003/043066

Priority 0127263.2 13.11.01 GB

Filing date 12 November 2002

Wipo publication date 26 May 2003

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 0127263.2 13.11.01 GB

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002348979

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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