METHOD FOR DEFINING A SOURCE AND A DRAIN AND A GAP INBETWEEN

Details for Australian Patent Application No. 2002348870 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors BLEES, Martin, H.; BOEHMER, Marcel, R.

Pub. Number AU-A-2002348870

PCT Number PCT/IB02/05036

PCT Pub. Number WO2003/049176

Priority 01204703.1 06.12.01 EP

Filing date 25 November 2002

Wipo publication date 17 June 2003

International Classifications

H01L 021/385 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 01204703.1 06.12.01 EP

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002348870

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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