AN INTERFEROMETER SYSTEM FOR A SEMICONDUCTOR EXPOSURE SYSTEM

Details for Australian Patent Application No. 2002348777 (hide)

Event Publications

13 March 2003 Complete Application Filed

17 July 2003 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

Application withdrawn under section 141(3)/See Reg. 8.3(2). This application was not yet Open to Public Inspection. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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