METHOD FOR ASHING

Details for Australian Patent Application No. 2002348636 (hide)

Owner PSK INC.

Inventors SONG, Yong-Hoon; PARK, Jin-Woo; YANG, Seung-Bok; JEON, Jong-Po

Pub. Number AU-A-2002348636

PCT Number PCT/KR02/01868

PCT Pub. Number WO2003/090269

Priority 2002/21538 19.04.02 KR

Filing date 7 October 2002

Wipo publication date 3 November 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 2002/21538 19.04.02 KR

11 December 2003 Application Open to Public Inspection

  Published as AU-A-2002348636

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002348637-PULSE TRANSFORMER FOR TRANSMITTING AND RECEIVING SIGNAL

2002348635-FASTENER AND ITS HANDLING TOOL