HEATED VACUUM SUPPORT APPARATUS

Details for Australian Patent Application No. 2002348258 (hide)

Owner ASML US, INC.

Inventors KURITA, Sam; VEECK, Kris; KANE, Tom; BAILEY, Jeff

Pub. Number AU-A-2002348258

PCT Number PCT/US02/38106

PCT Pub. Number WO2003/046957

Priority 60/333,447 26.11.01 US

Filing date 25 November 2002

Wipo publication date 10 June 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 60/333,447 26.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002348258

12 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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