METHOD AND APPARATUS FOR SCHEDULING PRODUCTION LOTS BASED ON LOT AND TOOL HEALTH METRICS
Details for Australian Patent Application No. 2002348125 (hide)
International Classifications
Event Publications
13 March 2003 Complete Application Filed
Priority application(s): 10/021,676 12.12.01 US
28 August 2003 Application Open to Public Inspection
Published as AU-A-2002348125
26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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