METHOD AND APPARATUS FOR CONTROLLING CMP PAD SURFACE FINISH

Details for Australian Patent Application No. 2002347820 (hide)

Owner LAM RESEARCH CORPORATION

Inventors STELLA, Mario; ZHAO, Eugene; RENTELN, Peter; FARBER, Jeffrey; JENSEN, Alan, J.

Pub. Number AU-A-2002347820

PCT Number PCT/US02/31924

PCT Pub. Number WO2003/037566

Priority 10/039,749 26.10.01 US

Filing date 4 October 2002

Wipo publication date 12 May 2003

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 049/04 Measuring

B24B 053/007 Devices or means for dressing or conditioning abrasive surfaces - Cleaning of grinding wheels

B24B 021/04 Machines or devices using grinding or polishing belts - for grinding plane surfaces

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 10/039,749 26.10.01 US

10 July 2003 Application Open to Public Inspection

  Published as AU-A-2002347820

15 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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