PHOTOLYTIC CONVERSION PROCESS TO FORM PATTERNED AMORPHOUS FILM

Details for Australian Patent Application No. 2002347803 (hide)

Owner EKC TECHNOLOGY, INC.

Inventors BRAVO-VASQUEZ, Juan-Pablo; HILL, Ross, H.

Pub. Number AU-A-2002347803

PCT Number PCT/US02/31683

PCT Pub. Number WO2003/031682

Priority 60/327,009 05.10.01 US

Filing date 4 October 2002

Wipo publication date 22 April 2003

International Classifications

C23C 018/14 Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating

C23C 018/06 Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating

C23C 018/12 Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 60/327,009 05.10.01 US

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002347803

24 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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