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Details for Australian Patent Application No. 2002347353 (hide)

Owner TRIKON TECHNOLOGIES LIMITED

Inventors BEEKMANN, Knut; GILES, Kathrine

Pub. Number AU-A-2002347353

PCT Number PCT/GB02/05521

PCT Pub. Number WO2003/050870

Priority 0129567.4 11.12.01 GB; 60/392,058 28.06.02 US

Filing date 6 December 2002

Wipo publication date 23 June 2003

International Classifications

H01L 023/532 Details of semiconductor or other solid state devices

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 0129567.4 11.12.01 GB; 60/392,058 28.06.02 US

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002347353

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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