Device for treating objects by plasma deposition

Details for Australian Patent Application No. 2002347187 (hide)

Owner AISAPACK HOLDING SA

Inventors Voigtmann, Jean-Pierre

Agent Spruson & Ferguson

Pub. Number AU-A-2002347187

PCT Number PCT/CH02/00698

PCT Pub. Number WO2003/054910

Priority 2354/01 20.12.01 CH

Filing date 16 December 2002

Wipo publication date 9 July 2003

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 2354/01 20.12.01 CH

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002347187

4 May 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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