METHOD AND DEVICE FOR DEPOSITING ESPECIALLY CRYSTALLINE LAYERS ONTO ESPECIALLY CRYSTALLINE SUBSTRATES

Details for Australian Patent Application No. 2002347033 (hide)

Owner AIXTRON AG

Inventors FRANKEN, Walter; KAPPELER, Johannes

Pub. Number AU-A-2002347033

PCT Number PCT/EP02/10871

PCT Pub. Number WO2003/038144

Priority 101 53 463.9 30.10.01 DE

Filing date 27 September 2002

Wipo publication date 12 May 2003

International Classifications

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

C30B 025/10 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Heating of the reaction chamber or the substrate

C30B 025/14 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Feed and outlet means for the gases

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 101 53 463.9 30.10.01 DE

10 July 2003 Application Open to Public Inspection

  Published as AU-A-2002347033

15 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002347034-EMBEDMENT-TYPE MOULD FOR MANUFACTURING BUILDING SLAB STRUCTURES

2002347032-LUBRICANT RESERVOIR FOR TYRE CAPABLE OF FLAT RUNNING