CHEMICAL VAPOR DEPOSITION VAPORIZER

Details for Australian Patent Application No. 2002346665 (hide)

Owner PRIMAXX, INC.

Inventors GRANT, Robert, W.; MCMILLAN, Larry, D.

Pub. Number AU-A-2002346665

PCT Number PCT/US02/38834

PCT Pub. Number WO2003/048412

Priority 60/337,637 04.12.01 US

Filing date 4 December 2002

Wipo publication date 17 June 2003

International Classifications

C23C 016/448 Chemical deposition or plating by decomposition - characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 60/337,637 04.12.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002346665

19 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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