SYSTEM AND METHOD FOR LASER MICROMACHINING

Details for Australian Patent Application No. 2002346597 (hide)

Owner POSITIVE LIGHT, INC.

Inventors FRY, Alan; WESTON, Jeremy; WHITE, William; TULLOCH, William

Pub. Number AU-A-2002346597

PCT Number PCT/US02/38266

PCT Pub. Number WO2003/049155

Priority 60/335,282 30.11.01 US; 10/150,822 15.05.02 US

Filing date 29 November 2002

Wipo publication date 17 June 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 60/335,282 30.11.01 US; 10/150,822 15.05.02 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002346597

19 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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