GENERATION, DISTRIBUTION, AND USE OF MOLECULAR FLUORINE WITHIN A FABRICATION FACILITY

Details for Australian Patent Application No. 2002346539 (hide)

Event Publications

13 March 2003 Complete Application Filed

Priority application(s): 10/038,745 02.01.02 US; 10/283,433 30.10.02 US; 10/193,864 12.07.02 US; 60/333,405 26.11.01 US

21 August 2003 Application Open to Public Inspection

Published as AU-A-2002346539

12 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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