PHOTOLITHOGRAPHIC CRITICAL DIMENSION CONTROL USING RETICLE MEASUREMENTS

Details for Australian Patent Application No. 2002346519 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors RANKIN, Jed, H.; SCHNEIDER, Crain, E.; SMYTH, John, S.; WATTS, Andrew, J.

Pub. Number AU-A-2002346519

PCT Number PCT/US02/37800

PCT Pub. Number WO2003/048857

Priority 09/997,904 30.11.01 US

Filing date 25 November 2002

Wipo publication date 17 June 2003

International Classifications

G03C 005/00 Photographic processes or agents therefor

G06F 019/00 Digital computing or data processing equipment or methods, specially adapted for specific applications

G21K 005/00 Irradiation devices

G06F 017/50 Digital computing or data processing equipment or methods, specially adapted for specific functions - Computer-aided design

G01D 018/00 Testing or calibrating of apparatus or arrangements provided for in groups

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 09/997,904 30.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002346519

19 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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