BILAYER HDP CVD / PE CVD CAP IN ADVANCED BEOL INTERCONNECT STRUCTURES AND METHOD THEREOF

Details for Australian Patent Application No. 2002346512 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION INFINEON TECHNOLOGIES NORTH AMERICA CORP

Inventors KANE, Terence; MCDONALD, Ann; FITZSIMMONS, John, A.; ENGEL, Brett, H.; CHEN, Tze-Chiang; KALTALIOGLU, Erdem; WANG, Yun, Yu; STAMPER, Anthony, K.; SEO, SoonCheon; MCGAHAY, Vincent; LUSTIG, Naftali, e.

Pub. Number AU-A-2002346512

PCT Number PCT/US02/37758

PCT Pub. Number WO2003/060983

Priority 10/047,964 15.01.02 US

Filing date 22 November 2002

Wipo publication date 30 July 2003

International Classifications

H01L 029/40 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier - Electrodes

H01L 023/52 Details of semiconductor or other solid state devices - Arrangements for conducting electric current within the device in operation from one component to another

H01L 023/48 Details of semiconductor or other solid state devices - Arrangements for conducting electric current to or from the solid state body in operation, e.g. leadsĀ or terminal arrangements

H01L 021/44 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 10/047,964 15.01.02 US

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002346512

30 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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