BILAYER HDP CVD / PE CVD CAP IN ADVANCED BEOL INTERCONNECT STRUCTURES AND METHOD THEREOF
Details for Australian Patent Application No. 2002346512 (hide)
International Classifications
Event Publications
13 March 2003 Complete Application Filed
Priority application(s): 10/047,964 15.01.02 US
4 September 2003 Application Open to Public Inspection
Published as AU-A-2002346512
30 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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