OPTICAL SYSTEM AND EXPOSURE APPARATUS HAVING THE OPTICAL SYSTEM

Details for Australian Patent Application No. 2002346320 (hide)

Owner NIKON CORPORATION

Inventors SHIRAISHI, Naomasa

Pub. Number AU-A-2002346320

PCT Number PCT/JP02/06964

PCT Pub. Number WO2003/007046

Priority 2001-208713 10.07.01 JP; 2001-214442 13.07.01 JP

Filing date 9 July 2002

Wipo publication date 29 January 2003

International Classifications

G02B 013/24 Optical objectives specially designed for the purposes specified below - for reproducing or copying at short object distances

G02B 017/08 Systems with reflecting surfaces, with or without refracting elements - Catadioptric systems

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G02B 013/14 Optical objectives specially designed for the purposes specified below - for use with infra-red or ultra-violet radiation

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 2001-208713 10.07.01 JP; 2001-214442 13.07.01 JP

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002346320

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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