FABRICATING STRUCTURES USING CHEMO-MECHANICAL POLISHING AND CHEMICALLY-SELECTIVE ENDPOINT DETECTION

Details for Australian Patent Application No. 2002345957 (hide)

Owner THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventors PETERSON, Jeffrey; HUNT, Charles

Pub. Number AU-A-2002345957

PCT Number PCT/US02/20453

PCT Pub. Number WO2003/005421

Priority 09/900,299 05.07.01 US

Filing date 26 June 2002

Wipo publication date 21 January 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 09/900,299 05.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002345957

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002345958-DILATION DEVICES AND METHODS FOR REMOVING TISSUE SPECIMENS

2002345956-METHOD AND APPARATUS FOR FABRICATING STRUCTURES USING CHEMICALLY SELECTIVE ENDPOINT DETECTION