METHOD AND APPARATUS FOR CONTROLLING A PLATING PROCESS

Details for Australian Patent Application No. 2002345688 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors PASADYN, Alexander, J.; SONDERMAN, Thomas, J.

Pub. Number AU-A-2002345688

PCT Number PCT/US02/18857

PCT Pub. Number WO2003/005430

Priority 09/897,626 02.07.01 US

Filing date 12 June 2002

Wipo publication date 21 January 2003

International Classifications

H01L 021/288 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 09/897,626 02.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002345688

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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