RECTOR HAVING A MOVALE SHUTER

Details for Australian Patent Application No. 2002345630 (hide)

Owner EMCORE CORPORATION

Inventors MOY, Keng; BOGUSLAVSKIY, Vadim; GURARY, Alexander; ELMAN, Scott

Pub. Number AU-A-2002345630

PCT Number PCT/US02/18440

PCT Pub. Number WO2002/099861

Priority 60/296,598 07.06.01 US; 10/046,426 16.01.02 US

Filing date 7 June 2002

Wipo publication date 16 December 2002

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 60/296,598 07.06.01 US; 10/046,426 16.01.02 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002345630

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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