LINE NARROWING UNIT WITH FLEXURAL GRATING MOUNT

Details for Australian Patent Application No. 2002345600 (hide)

Owner CYMER, INC.

Inventors TITUS, Clay, C.; HULBURD, William, G.; CYBULSKI, Raymond, F.; ALGOTS, John, M.; LYSIK, Michael, S.

Pub. Number AU-A-2002345600

PCT Number PCT/US02/17999

PCT Pub. Number WO2003/003531

Priority 09/895,664 29.06.01 US

Filing date 5 June 2002

Wipo publication date 3 March 2003

International Classifications

H01S 003/08 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Construction or shape of optical resonators or components thereof

H01S 003/10 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 09/895,664 29.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002345600

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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