METHOD OF DEPOSITING ALUMINIUM NITRIDE

Details for Australian Patent Application No. 2002345179 (hide)

Owner TRIKON HOLDINGS LIMITED

Inventors RICH, Paul; WIGGINS, Claire, Louise

Pub. Number AU-A-2002345179

PCT Number PCT/GB02/02946

PCT Pub. Number WO2003/006701

Priority 0116688.3 07.07.01 GB

Filing date 20 June 2002

Wipo publication date 29 January 2003

International Classifications

C23C 014/06 Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the coating material

H01L 041/24 Piezo-electric elements in general - of elements of ceramic composition

C23C 014/00 Coating by vacuum evaporation, by sputtering or by ion implantation

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 0116688.3 07.07.01 GB

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002345179

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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