METHOD AND DEVICE FOR TREATING A SUBSTRATE

Details for Australian Patent Application No. 2002345004 (hide)

Owner SWISS-PLAS.COM AG GABRIEL, Herbert, M.

Inventors CURTINS, Hermann

Pub. Number AU-A-2002345004

PCT Number PCT/EP02/06085

PCT Pub. Number WO2002/101113

Priority 101 26 986.2 05.06.01 DE

Filing date 4 June 2002

Wipo publication date 23 December 2002

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

C23C 014/32 Coating by vacuum evaporation, by sputtering or by ion implantation - by explosion

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 101 26 986.2 05.06.01 DE

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002345004

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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