ZONE PLATE, MEASURING METHOD USING IT, AND PRODUCTION METHOD FOR PROJECTION OPTICAL SYSTEM

Details for Australian Patent Application No. 2002344478 (hide)

Owner NIKON CORPORATION

Inventors NAKAYAMA, Shigeru

Pub. Number AU-A-2002344478

PCT Number PCT/JP02/11604

PCT Pub. Number WO2003/040650

Priority 2001/343514 08.11.01 JP

Filing date 7 November 2002

Wipo publication date 19 May 2003

International Classifications

G01B 011/24 Measuring arrangements characterised by the use of optical means - for measuring contours or curvatures

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 2001/343514 08.11.01 JP

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002344478

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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