METHOD FOR CONTROLLED MODIFICATION OF THE REFLECTIVE QUALITIES OF A MULTI-LAYER

Details for Australian Patent Application No. 2002344277 (hide)

Owner XENOCS

Inventors HOGHOJ, Peter

Pub. Number AU-A-2002344277

PCT Number PCT/FR02/01830

PCT Pub. Number WO2002/097485

Priority 01/07228 01.06.01 FR; 01/09729 20.07.01 FR

Filing date 31 May 2002

Wipo publication date 9 December 2002

International Classifications

G02B 005/26 Optical elements other than lenses - Reflecting filters

G02B 005/28 Optical elements other than lenses - Interference filters

G03F 001/00 Preparation of originals for the photomechanical production of textured or patterned surfaces

C23C 014/22 Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the process of coating

G03F 001/14 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals characterised by structural details, e.g. supports, cover layers, pellicle rings

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 01/07228 01.06.01 FR; 01/09729 20.07.01 FR

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002344277

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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