AGENT FOR FORMING COATING FOR NARROWING PATTERN AND METHOD FOR FORMING FINE PATTERN USING THE SAME

Details for Australian Patent Application No. 2002343866 (hide)

Owner TOKYO OHKA KOGYO CO., LTD.

Inventors SUGETA, Yoshiki; KANEKO, Fumitake; TACHIKAWA, Toshikazu

Pub. Number AU-A-2002343866

PCT Number PCT/JP02/11498

PCT Pub. Number WO2003/040832

Priority 2001-339309 05.11.01 JP; 2002-080517 22.03.02 JP

Filing date 5 November 2002

Wipo publication date 19 May 2003

International Classifications

G03F 007/40 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Treatment after imagewise removal, e.g. baking

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 2001-339309 05.11.01 JP; 2002-080517 22.03.02 JP

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002343866

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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