PROCESS FOR PRODUCING SILICON CARBIDE SINTER JIG FOR USE IN SEMICONDUCTOR PRODUCTION AND SILICON CARBIDE SINTER JIG OBTAINED BY THE PROCESS

Details for Australian Patent Application No. 2002343790 (hide)

Owner BRIDGESTONE CORPORATION

Inventors ODAKA, Fumio

Pub. Number AU-A-2002343790

PCT Number PCT/JP02/11292

PCT Pub. Number WO2003/040059

Priority 2001-343427 08.11.01 JP

Filing date 30 October 2002

Wipo publication date 19 May 2003

International Classifications

C04B 035/56 Shaped ceramic products characterised by their composition - based on carbides

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

H01L 021/265 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H05B 003/14 Ohmic-resistance heating - the material being non-metallic

C04B 041/80 After-treatment of mortars, concrete, artificial stone or ceramics - of only ceramics

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 2001-343427 08.11.01 JP

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002343790

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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